Independently selectable features of XPS MultiQuant

Feature	Options	Remarks
Quantification models »	Homogeneous Oxide-Layer Layers-on-Plane Layers-on-Sphere ¹ Layers-on-Cylinder Layers-on-Polyhedron Layers-on-Nanotube ² Islands-on-Plane Islands-on-Sphere ¹ Islands-on-Cylinder Islands-on-Polyhedron	¹ Single row variant. ² Modified tube layer variant.
Multiline approach ¹	None Average Ebel	¹ For homogeneous model.
Excitation sources	Mg Kα Al Kα Other ¹	¹ Excitation energy is supplied by the user.
Cross-section or sensitivity factor sets	None ¹ Scofield Evans Wagner Nefedov	¹ Sensitivity factors or cross-sections are supplied by the user.
IMFP correction	None Explicit ^{1, 2} Exponential ¹ Seah-Dench ^{1, 2} Jablonski ¹ Tanuma-Powell-Penn ² Gries ^{1, 2} Cumpson-Seah ^{2, 3}	¹ For homogeneous model. ² For structured models to calculate explicit IMFP values. ³ Attenuation length.
Angular correction	None Reilman Reilman-Ebel ¹	¹ Correction for elastic scattering.
Contamination correction ¹	None Explicit Evans Mohai	¹ For structured models contamination correction can be implemented by specifying a definite contaminant layer.
Analyser transmission correction	None FRR, CRR FAT, CAE Exponential File: Polynomial (0 - 6) ¹ Exponential ¹ Rational (NPL) Combined (Unifit) Tabulated ²	¹ Separate coefficient sets for different kinetic energy regions. ² Linear interpolation.
Result normalisation	Atomic percent Atomic ratio Oxide molar percent ¹ Oxide molar ratio ¹ Mass percent Mass ratio Oxide mass percent ¹ Oxide mass ratio ¹	¹ Oxygen balance is calculated.